Research

  • Major : Plasma Engineering
  • Research : #Plasma Engineering #Optical Emission Spectroscopy #Semiconductor Display Process Virtual Metrology #Advanced Process Control #Plasma Material Interaction #Process Big Data Application

Education

  • 1993. Ph.D. in Engineering Physics, University of Wisconsin
  • 1985. M.A. in Nuclear Engineering, Hanyang University
  • 1983. Bachelor of Nuclear Engineering, Hanyang University

Career

  • 2003.03 – present Professor, Seoul National University
  • 2008.03 – 2008.11 Advisory professor, Samsung Mechatronics Center
  • 1995.03 – 2003.02 Associate professor, Hanyang University
  • 1993.09 – 1995.02 Research scientist, ERC-PAM
  • 1985.04 – 1986.12 Researcher, KAERI